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Wiktionary defines a criterion as "a standard or test by which individual things or people may be compared and judged". See here for the full entry.

The plural of criterion is criteria.

A criterion-based benchmarking methodology has a set of criteria covering different aspects of benchmarking. There may be anything from 5 to 500 criteria, grouped in various ways.

Criteria can themselves have structure, via sub-criteria or indicators.

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